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Electrical properties of nanoscale TiSi2 islands on Si

著者名:
掲載資料名:
Self-organized processes in semiconductor alloys : symposium held November 29-December 2, 1999 Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
583
発行年:
2000
開始ページ:
111
出版情報:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994911 [1558994912]
言語:
英語
請求記号:
M23500/583
資料種別:
国際会議録

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