Bhuwalka, Krishna Kumar ; Mohapatra, Nihar R. ; Narendra, Siva G. ; Rao, V. Ramgopal
出版情報:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.215-220, 2002. Warrendale. Materials Research Society
Mohapatra, Nihar R. ; Desai, Madhav P. ; Narendra, Siva G. ; Rao, V. Ramgopal
出版情報:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.133-138, 2002. Warrendale. Materials Research Society