Teerlinck, I. ; Schmidt, H.F. ; Rotondaro, A.L.P. ; Hurd, T.Q. ; Mouche, L. ; Mertens, P.W. ; Meuris, M. ; Heyns, M.M. ; Vanhaeren, D. ; Vandervorst, W.
出版情報:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.284-291, 1995. Pennington, NJ. Electrochemical Society
Mertens, P.W. ; Hurd, T.Q. ; Graf, D. ; Meuris, M. ; Schmidt, H.F. ; Heyns, M.M.
出版情報:
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.241-252, 1994. Pennington, NJ. Electrochemical Society
Verhaverbeke, S. ; Meuris, M. ; Mertens, P. ; Schmidt, H. ; Heyns, M.M. ; Philipossian, A. ; Graeff, D. ; Dillenbeck, K.
出版情報:
Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993. pp.199-219, 1993. Pennington, NJ. Electrochemical Society
Wolke, K. ; Riedel, T. ; Haug, R. ; De Gendt, S. ; Heyns, M.M. ; Meuris, M.
出版情報:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.204-211, 1999. Pennington, NJ. Electrochemical Society
Rotondaro, A.L.P. ; Meuris, M. ; Schmidt, H.F. ; Heyns, M.M. ; Vandervorst, W. ; Claeys, C. ; Hellemans, L. ; Snauvaert, I.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.581-586, 1994. Pennington, NJ. Electrochemical Society
Meuris, M. ; Izumi, H. ; Kubo, K. ; Ojima, S. ; Ohmi, T. ; Heyns, M.M.
出版情報:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.444-448, 1995. Pennington, NJ. Electrochemical Society
Kenens, C. ; De Gendt, S. ; Knotter, D.M. ; Loewenstein, L.M. ; Meuris, M. ; Vandervorst, W. ; Heyns, M.M.
出版情報:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.247-255, 1997. Pennington, NJ. Electrochemical Society
Mertens, P.W. ; Meuris, M. ; Schmidt, H.F. ; Verhaverbeke, S. ; Heyns, M.M. ; Carr, P. ; Graeff, D. ; Schnegg, A. ; Kubota, M. ; Dillenbeck, K. ; de Blank, R.
出版情報:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.87-102, 1993. Pennington, NJ. Electrochemical Society
Meuris, M. ; Verhaverbeke, S. ; Mertens, P.W. ; Schmidt, H.F. ; Rotondaro, A.L.P. ; Heyns, M.M. ; Philipossian, A.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.15-25, 1994. Pennington, NJ. Electrochemical Society
Elsmore, C. ; Hurd, T.Q. ; Clarke, J. ; Meuris, M. ; Mertens, P.W. ; Heyns, M.M.
出版情報:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.142-149, 1995. Pennington, NJ. Electrochemical Society