CHARACTERIZATION OF InP/GaInAs NANOMETER SIZED COLUMNS PRODUCED BY AEROSOL DEPOSITION AND PLASMA ETCHING
- 著者名:
Maximov, I. Deppert, K. Montelius, L. Samuelson, L. Gray, S. Johansson, M. Hansson, H. -C. Wiedensohler, A. - 掲載資料名:
- Determining nanoscale physical properties of materials by microscopy and spectroscopy
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 332
- 発行年:
- 1994
- 開始ページ:
- 513
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992313 [1558992316]
- 言語:
- 英語
- 請求記号:
- M23500/332
- 資料種別:
- 国際会議録
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