M. Dusa ; J. Quaedackers ; O. F. A. Larsen ; J. Meessen ; E. van der Heijden ; G. Dicker ; O. Wismans ; P. de Haas ; K. van I. Schenau ; J. Finders ; B. Vleeming ; G. Storms ; P. Jaenen ; S. Cheng ; M. Maenhoudt
出版情報:
Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
M. Dusa ; B. Arnold ; J. Finders ; H. Meiling ; K. van Ingen Schenau
出版情報:
Photomask and next-generation lithography mask technology XV. 1 pp.702810-1-702810-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering