M. Bauer ; Y. Zhang ; D. Weeks ; P. Brabant ; J. Italiano
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 4 : new materials, processes and equipment. pp.287-298, 2008. Pennington, N.J.. Electrochemical Society
M. Bauer ; Y. Zhang ; D. Weeks ; V. Machkaoutsan ; S. Thomas
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment. pp.419-428, 2007. Pennington, NJ. Electrochemical Society