Mercha, A. ; Simoen, E. ; Rafi, J.-M. ; Clacys, C. ; Lukyanchikova, N. ; Petrichuk, M. ; Garbar, N.
出版情報:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.319-324, 2003. Pennington, N.J.. Electrochemical Society