ELECTRON CYCLOTRON RESONANCE PLASMA ETCHING/CLEANING FOR Si DEVICE FABRICATION
- 著者名:
- 掲載資料名:
- Surface chemical cleaning and passivation for semiconductor processing
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 315
- 発行年:
- 1993
- 開始ページ:
- 225
- 出版情報:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992139 [1558992138]
- 言語:
- 英語
- 請求記号:
- M23500/315
- 資料種別:
- 国際会議録
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