Lucovsky, G. ; Ma, Y. ; He, S.S. ; Yasuda, T. ; Stephens, D.J. ; Habermehl, S.
出版情報:
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.33-38, 1993. Pittsburgh, Pa.. Materials Research Society
Ma, Y. ; Yasuda, T. ; Chen, Y.L. ; Lucovsky, G. ; Maher, D.M.
出版情報:
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.147-152, 1993. Pittsburgh, Pa.. Materials Research Society
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.413-418, 1993. Pittsburgh, Pa.. Materials Research Society
Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.. pp.759-766, 1993. Pittsburgh, Pa.. Materials Research Society
Kim, S. S. ; Wang, C. ; Parsons, G. N. ; Lucovsky, G.
出版情報:
Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A.. pp.373-378, 1990. Pittsburgh, Pa.. Materials Research Society
Chen, Y.L. ; Bentley, J. ; Wang, C. ; Lucovsky, G. ; Maher, D.M.
出版情報:
Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.. pp.711-716, 1993. Pittsburgh, Pa.. Materials Research Society
Ma, Y. ; Yasuda, T. ; Habermehl, S. ; Lucovsky, G.
出版情報:
Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.341-348, 1992. Pittsburgh, Pa.. Materials Research Society
Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.277-282, 1991. Pittsburgh, Pa.. Materials Research Society
Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.195-200, 1991. Pittsburgh, Pa.. Materials Research Society
Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.. pp.521-526, 1993. Pittsburgh, Pa.. Materials Research Society
Rayner, U.B., Jr. ; Kang, D. ; Schultz, M. ; Mai, K. ; Lucovsky, G.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.413-428, 2002. Pennington, NJ. Electrochemical Society
Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.. pp.A26.7-, 2001. Warrendale. Materials Research Society
Hattangady, S. ; Misra, V. ; Yasuda, T. ; Xu, X.L. ; Hornung, B. ; Lucovsky, G. ; Wortman, J.J.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.288-295, 1994. Pennington, NJ. Electrochemical Society
Lu, Z. ; Habermehl, S. ; Lucovsky, G. ; Dietz, N. ; Bachmann, K.J. ; Osgood, R.M.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.416-424, 1994. Pennington, NJ. Electrochemical Society
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.263-268, 1989. Pittsburgh, Pa.. Materials Research Society
Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A.. pp.289-294, 1989. Pittsburgh, Pa.. Materials Research Society
Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.. pp.871-876, 1993. Pittsburgh, Pa.. Materials Research Society
Stephens, D.J. ; He, S.S. ; Lucovsky, G. ; Mikkelsen, H. ; Leo, K. ; Kurz, H.
出版情報:
Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A.. pp.223-228, 1993. Pittsburgh, PA. Materials Research Society
Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A.. pp.341-346, 1987. Pittsburgh, Pa.. Materials Research Society
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.197-202, 1989. Pittsburgh, Pa.. Materials Research Society
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.289-294, 1989. Pittsburgh, Pa.. Materials Research Society
Choi, Seong S. ; Kim, S.S. ; Tsu, D.V. ; Lucovsky, G.
出版情報:
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.313-318, 1989. Pittsburgh, Pa.. Materials Research Society
Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.89-94, 1987. Pittsburgh, Pa.. Materials Research Society
Materials issues in microcrystalline semiconductors : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.265-270, 1990. Pittsburgh, Pa.. Materials Research Society
Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A.. pp.81-86, 1992. Pittsburgh, Pa.. Materials Research Society
Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.. pp.595-602, 1987. Pittsburgh, Pa.. Materials Research Society
Emmerichs, U. ; Meyer, C. ; Leo, K. ; Kurz, H. ; Bjorkman, C.H. ; Shearon, Jr., C.E. ; Ma, Y. ; Yasuda, T. ; Lucovsky, G.
出版情報:
Semiconductor heterostructures for photonic and electronic applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.815-820, 1993. Pittsburgh, Pa.. Materials Research Society
Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.. pp.589-594, 1987. Pittsburgh, Pa.. Materials Research Society
Stephens, D.J. ; He, S.S. ; Lucovsky, G. ; Mikkelsen, H. ; Leo, K. ; Kurz, H.
出版情報:
Semiconductor heterostructures for photonic and electronic applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.809-814, 1993. Pittsburgh, Pa.. Materials Research Society
Kim, S. S. ; Tsu, D. V. ; Lucovsky, G. ; Fountain., G. G. ; Markunas, R. J
出版情報:
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.327-332, 1989. Pittsburgh, Pa.. Materials Research Society
Yasuda, T. ; Ma, Y. ; Habermehl, S. ; Kim, S.S. ; Lucovsky, G. ; Schneider, T.P. ; Cho, J. ; Nemanich R.J.
出版情報:
Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A.. pp.395-400, 1991. Pittsburgh, Pa.. Materials Research Society
Plasma processing and synthesis of materials : symposium held April 21-23, 1987, Anaheim, California, U.S.A.. pp.285-290, 1987. Pittsburgh, Pa.. Materials Research Society
Yasuda, T. ; Ma, Y. ; Habermechl, S. ; Lucovsky, G.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.473-480, 1992. Pittsburgh, Pa.. Materials Research Society
Materials issues in applications of amorphous silicon technology : symposium held April 15-17, 1985, San Francisco, California, U.S.A.. pp.135-144, 1985. Pittsburgh, Pa.. Materials Research Society
He, S. S. ; Stephens, D. J. ; Ma. Y. ; Yasuda, T. ; Habermehl, S. ; Lucovsky, G.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.653-658, 1992. Pittsburgh, Pa.. Materials Research Society
Materials issues in amorphous-semiconductor technology : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.77-82, 1986. Pittsburgh, Pa.. Materials Research Society
Lin, S.Y. ; Lucovsky, G. ; Guha, S. ; Payson, J.S.
出版情報:
Materials issues in amorphous-semiconductor technology : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.107-112, 1986. Pittsburgh, Pa.. Materials Research Society
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA. pp.529-534, 1985. Pittsburgh, Pa.. Materials Research Society
Structure and properties of interfaces in materials : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A.. pp.713-720, 1992. Pittsburgh. Materials Research Society
Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A.. pp.279-284, 1990. Pittsburgh, Pa.. Materials Research Society
Materials issues in microcrystalline semiconductors : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.21-26, 1990. Pittsburgh, Pa.. Materials Research Society
Ma, Y. ; Yasuda, T. ; Habermehl, S. ; He, S.S. ; Stephens, D.J. ; Lucovsky, G.
出版情報:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.69-74, 1992. Pittsburgh, Pa.. Materials Research Society
Lamb, H.H. ; Kalem, S. ; Bedge, S. ; Yasuda, T. ; Ma, Y. ; Lucovsky, G.
出版情報:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.75-80, 1992. Pittsburgh, Pa.. Materials Research Society
SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.. pp.121-126, 1988. Pittsburgh, Pa.. Materials Research Society
Tsu, D. V. ; Parsons, G. N. ; Lucovsky, G. ; Watkins, M. W.
出版情報:
SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.. pp.73-84, 1988. Pittsburgh, Pa.. Materials Research Society
SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.. pp.151-156, 1988. Pittsburgh, Pa.. Materials Research Society
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.. pp.505-510, 1993. Pittsburgh, Pa.. Materials Research Society
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.. pp.523-528, 1993. Pittsburgh, Pa.. Materials Research Society
Osburn, C.M. ; Han, S.K. ; Kim, I. ; Campbell, S.A. ; Garfunkel, E. ; Gustafson, T. ; Hauser, J. ; King, T.-J. ; Liu, Q. ; Ranade, P. ; Kingon, A. ; Kwong, D.-L. ; Lee, S.J. ; Lee, C.H. ; Lee, J. ; Onishi, K. ; Kang, C.S. ; Choi, R. ; Cho, H. ; Nich, R. ; Lucovsky, G. ; Hong, J.G. ; Ma, T.P. ; Zhu, W. ; Luo, Z. ; Maria, J.P. ; Wicaksana, D. ; Misra, V. ; Lee, J.J. ; Suh, Y.S. ; Parksons, G. ; Niu, D. ; Stemmer, S.
出版情報:
ULSI Process Integration : proceedings of the International Symposium. pp.375-390, 2003. Pennington, N.J.. Electrochemical Society
Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A.. pp.265-270, 1989. Pittsburgh, Pa.. Materials Research Society
Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A.. pp.75-80, 1989. Pittsburgh, Pa.. Materials Research Society
Ma, Y. ; Yasuda, T. ; Habermehl, S. ; Lucovsky, G.
出版情報:
Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.799-806, 1992. Pittsburgh, Pa.. Materials Research Society
Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.. pp.691-696, 1987. Pittsburgh, Pa.. Materials Research Society
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.851-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.103-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Lucovsky, G. ; Santos-Filho, P. ; Banerjee, A. ; Jing, Z.
出版情報:
Amorphous silicon technology, 1996 : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.503-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Amorphous silicon technology, 1996 : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.405-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.355-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Wolfe, D. ; Flock, K. ; Therrien, R. ; Johnson, R. ; Rayner, B. ; Gunther, L. ; Brown, N. ; Claflin, B. ; Lucovsky, G.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.343-, 1999. Warrendale, PA. MRS - Materials Research Society
Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A.. pp.427-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A.. pp.715-, 1999. Warrendale. MRS - Materials Research Society
Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.267-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Stevens, G. ; Santos-Filho, P. ; Habermehl, S. ; Lucovsky, G.
出版情報:
Amorphous silicon technology, 1995 : Symposium held April 18-21, 1995, San Francisco, California, U.S.A.. pp.313-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Hattangady, S. V. ; Niimi, H. ; Gandhi, S. ; Lucovsky, G.
出版情報:
Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.213-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Brillson, L. J. ; Young, A. P. ; Schafer, J. ; Niimi, H. ; Lucovsky, G.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.549-, 1999. Warrendale, PA. MRS - Materials Research Society
Amorphous silicon technology, 1996 : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.629-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.63-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Santos-Filho, P. ; Koh, K. ; Stevens, G. ; Lucovsky, G.
出版情報:
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.57-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.191-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Lucovsky, G. ; Yasuda, T. ; Ma, Y. ; Hattangady, S. V. ; Xu, X-L. ; Misra, V. ; Hornung, B. ; Wortman, J. J.
出版情報:
Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.81-, 1994. Pittsburgh. MRS - Materials Research Society
Lucovsky, G. ; Parker, C. R. ; Wu, Y. ; Hauser, J. R.
出版情報:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.187-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Schafer, J. ; Young, A. P. ; Brillson, L. J. ; Niimi, H. ; Lucovsky, G.
出版情報:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.151-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Yee, K. F. ; Osburn, C. M. ; Masnari, N. A. ; Hauser, J. R. ; Parker, C. G. ; Lucovsky, G. ; Henson, W. K. ; Wortman, J. J. ; Kippenberg, T. ; Kuerschner, S.
出版情報:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.157-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A.. pp.111-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Wolfe, D. M. ; Wang, F. ; Hinds, B. J. ; Lucovsky, G.
出版情報:
Power semiconductor materials and devices : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A.. pp.203-, 1998. Warrendale, Penn.. MRS - Materials Research Society
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.219-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.241-, 1999. Warrendale, PA. MRS - Materials Research Society
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.201-, 1999. Warrendale, PA. MRS - Materials Research Society
Claflin, B. ; Binger, M. ; Lucovsky, G. ; Yang, H.-Y.
出版情報:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.171-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Microcrystalline and nanocrystalline semiconductors--1998 : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.. pp.111-, 1999. Warrendale, PA. MRS - Materials Research Society
Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.361-, 1996. Pittsburgh, PA. MRS - Materials Research Society