Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.103-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.267-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Hattangady, S. V. ; Niimi, H. ; Gandhi, S. ; Lucovsky, G.
出版情報:
Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.213-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Brillson, L. J. ; Young, A. P. ; Schafer, J. ; Niimi, H. ; Lucovsky, G.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.549-, 1999. Warrendale, PA. MRS - Materials Research Society
Schafer, J. ; Young, A. P. ; Brillson, L. J. ; Niimi, H. ; Lucovsky, G.
出版情報:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.151-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.241-, 1999. Warrendale, PA. MRS - Materials Research Society
Ma, Y. ; Hattangady, S. V. ; Yasuda, T. ; Niimi, H. ; Gandhi, S. ; Lucovsky, G.
出版情報:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.169-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Lucovsky, G. ; Niimi, H. ; Koh, K. ; Lee, D.R. ; Jing, Z.
出版情報:
The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface. pp.441-455, 1996. Pennington, NJ. Electrochemical Society
国際会議録
