Daniel, J.H. ; Krusor, B. ; Lau, R. ; Lu, J.P. ; Wang, Y. ; Mulato, M. ; Apte, R.B. ; Street, R.A. ; Goredema, A. ; Boils-Boissier, D.C. ; Silver, S.E. ; Kazmaier, P.M.
出版情報:
Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.. 2001. Warrendale, Pa.. Materials Research Society
Lemmi, F. ; Mulato, M. ; Ho, J. ; Lau, R. ; Lu, J.P. ; Street, R.A.
出版情報:
Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A.. 2001. Warrendale. Materials Research Society
Mulato, M. ; Lu, J.P. ; Ready, S.E. ; Schuylenbergh, K. Van ; Ho, J. ; Lau, R. ; Boyce, J.B. ; Street, R.A.
出版情報:
Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A.. 2001. Warrendale. Materials Research Society