Wan, J.W. ; Park, S.H. ; Chung, G. ; Carlson, E. ; Loboda, M.J.
出版情報:
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.447-450, 2006. Stafa-Zuerich. Trans Tech Publications
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.721-724, 2006. Stafa-Zuerich. Trans Tech Publications
Neimontas, K. ; Kadys, A. ; Aleksiejunas, R. ; Jarasiunas, K. ; Chung, G. ; Sanchez, E.K. ; Loboda, M.J.
出版情報:
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.469-472, 2006. Stafa-Zuerich. Trans Tech Publications
Li, Q. ; Polyakov, A.Y. ; Skowronski, M. ; Sanchez, E.K. ; Loboda, M.J. ; Fanton, M.A. ; Bogart, T. ; Gamble, D. ; Smirnov, N.B. ; Makarov, Yu.N.
出版情報:
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.51-54, 2006. Stafa-Zuerich. Trans Tech Publications
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.59-62, 2006. Stafa-Zuerich. Trans Tech Publications
Loboda, M.J. ; Seifferly, J.A. ; Schneider, R.F. ; Grove, C.M.
出版情報:
Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability. pp.145-152, 1998. Pennington, N.J.. Electrochemical Society
MacMillan, M.F. ; Loboda, M.J. ; Chung, G. ; Carlson, E. ; Wan, J.
出版情報:
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.175-178, 2006. Stafa-Zuerich. Trans Tech Publications
Shepherd, R.A. ; Nguyen, D. ; Cerny, G. ; Loboda, M.J.
出版情報:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium. pp.159-167, 2000. Pennington, N.J.. Electrochemical Society
Hwang, B.K. ; Loboda, M.J. ; Cerny, G. ; Schneider, R. ; Seifferly, J.
出版情報:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium. pp.63-71, 2000. Pennington, N.J.. Electrochemical Society
Steckl, A.J. ; Yuan, C. ; Tong, Q.Y. ; Goesele, U. ; Loboda, M.J.
出版情報:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.117-122, 1994. Pennington, NJ. Electrochemical Society
国際会議録
