Loboda, M.J. ; Seifferly, J.A. ; Schneider, R.F. ; Grove, C.M.
出版情報:
Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability. pp.145-152, 1998. Pennington, N.J.. Electrochemical Society
Loboda, M.J. ; Seifferly, J.A. ; Grove, C.M. ; Schneider, R.F.
出版情報:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.443-453, 1997. Pennington, New Jersey. Electrochemical Society
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