Shepherd, R.A. ; Nguyen, D. ; Cerny, G. ; Loboda, M.J.
出版情報:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium. pp.159-167, 2000. Pennington, N.J.. Electrochemical Society
Hwang, B.K. ; Loboda, M.J. ; Cerny, G. ; Schneider, R. ; Seifferly, J.
出版情報:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium. pp.63-71, 2000. Pennington, N.J.. Electrochemical Society
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