Xiong, S. B. ; Liu, Z. G. ; Chen, X. Y. ; Guo, X. L. ; Yu, T. ; Zhu, S. N. ; Liu, X. ; Luo, W. G.
出版情報:
Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A.. pp.149-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Hu, W. S. ; Liu, Z. G. ; Chen, Y-F. ; Yu, T. ; Zhao, H. W. ; Hu, X. B. ; Liu, X. ; Wu, R. X.
出版情報:
Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A.. pp.155-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society