1.

国際会議録
国際会議録
1. Which etchant used and whether an etching mask exists:how they make differences on convex-corner undercutting configuration and compensation criteria
Li,X. ; Lin,R. ; Miao,J. ; Bao,M.
出版情報: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.129-136,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3874
2.

国際会議録
国際会議録
2. Deep cavity-shaped diaphragm for enhancement of microphone mechanical sensitivity
Li,X. ; Lin,R. ; Kek,H.
出版情報: Micromachined Devices and Components VI.  pp.59-66,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4176