Fabrication of micromirror supported by electroplated nickel posts

Fabrication of micromirror supported by electroplated nickel posts

著者名:

Shin,J.-W. ( Seoul National Univ. )

掲載資料名:

Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2641

発行年:

1995

開始ページ:

88

終了ページ:

95

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420077 [0819420077]

言語:

英語

請求記号:

P63600/2641

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017471
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
回次:	1995
会議開催地:	Austin, TX, USA
会議開催年:	1995.10.24

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