Chen, P. S. ; Pei, Z. ; Lee, S. W. ; Tsai, M. -J. ; Liu, C.W. (ITRI)
出版情報:
SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.289-298, 2004. Pennington, N.J.. Electrochemical Society
Chen, P. S. ; Lee, M. H. ; Lee, S. W. ; Liu, C. W. ; Tsai, M.-J. (Invited Paper)
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.487-496, 2005. Pennington, NJ. Electrochemical Society
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