Bae, J. ; Kim, J. ; Hwang, I ; Kim, H. ; Lee, J. ; Park, H. ; Tominaga, J.
出版情報:
Optical Data Storage 2006 : 23-26 April 2006, Montreal, Canada. pp.628217-628218, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Lee, J. ; Char, K. ; Kim, H. ; Rhee, H. ; Ro, H. ; Yoo, D. ; Yoon, D.Y.
出版情報:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D3.6-, 2001. Warrendale, PA. Materials Research Society