1.

国際会議録
国際会議録
1. KrF EXCIMER LASER DEPOSITION OF TITANIUM FROM TiCl4
Izquierdo, R. ; Lavoie, C. ; Meunier, M.
出版情報: In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.141-146,  1990.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 158
2.

国際会議録
国際会議録
2. KrF EXCIMER LASER DIRECT WRITING OF TITANIUM LINES: MODELING AND APPLICATION TO THE FABRICATION OF Ti:LiNbO3 WAVEGUIDES
Meunier, M. ; Lavoie, C. ; Boivin, S. ; Izquierdo, R. ; Desjardins, P. ; Najafi, S.I.
出版情報: Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A..  pp.625-630,  1991.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 201
3.

国際会議録
国際会議録
3. 70 Reactive Diffusion in the Ni-Si System: Influence of Ni Thickness on the Phase Formation Sequence
Coia, C. ; Lavoie, C. ; d'Heurle, F. M. ; Desjardins, P. ; Detavernier, C. ; Kellock, A. J. (Invited Paper)
出版情報: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.585-596,  2005.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2005-05
4.

国際会議録
国際会議録
4. In Situ Analysis of the Formation of Thin TiSi2 (<50 nm) Contacts in Submicron CMOS Structures During Rapid Thermal Annealing
Clevenger, L. A. ; Cabral, C., Jr ; Roy, R. A. ; Lavoie, C. ; Viswanathan, R. ; Saenger, K. L. ; Jordan-Sweet, J. ; Morales, G. ; Ludwig, K. L., Jr ; Stephenson, G. B.
出版情報: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.257-,  1996.  Pittsburgh.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 402
5.

国際会議録
国際会議録
5. LIGHT SCATTERING MEASUREMENTS OF SURFACE ROUGHNESS IN MOLECULAR BEAM EPITAXY GROWTH OF GaAs
Lavoie, C. ; Nissen, M. K. ; Eisebitt, S. ; Johnson, S. R. ; Mackenzie, J. A. ; Tiedje, T.
出版情報: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.119-,  1994.  Pittsburgh.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 324
6.

国際会議録
国際会議録
6. LIGHT SCATTERING STUDY OF THE EVOLUTION OF THE SURFACE MORPHOLOGY DURING GROWTH OF InGaAs ON GaAs
Lavoie, C. ; Haveman, B. ; Nodwell, E. ; Pinnington, T. ; Tiedje, T. ; Goldman, R. S. ; Kavanagh, K. L. ; Hutter, J. L. ; Bechhoefer, J.
出版情報: Applications of synchrotron radiation techniques to materials science II : symposium held November 27-December 2, 1994, Boston, Massachusetts, USA.  pp.193-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 375
7.

国際会議録
国際会議録
7. The Future of Silicide for CMOS Contacts
Roy, R. A. ; Cabral, C., Jr. ; Lavoie, C.
出版情報: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.35-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 564
8.

国際会議録
国際会議録
8. Light Scattering Measurement of Surface Topography During Formation of Titanium Silicide
Lavoie, C. ; Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E. ; Jordan-Sweet, J. ; Saenger, K. L. ; Doany, F.
出版情報: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.163-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 406
9.

国際会議録
国際会議録
9. Classification of the Modes of Dissociation in Immiscible Cu-Alloy Thin Films
Barmak, K. ; Lucadamo, G. A. ; Cabral, C., Jr. ; Lavoie, C. ; Harper, J. M. E.
出版情報: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.341-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 564
10.

国際会議録
国際会議録
10. Surface Roughening During Titanium Silicide Formation: A Comparison Between Si(100) and Poly-Si Substrates
Lavoie, C. ; Martel, R. ; Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E.
出版情報: Structure and evolution of surfaces : symposium held December 2-5, 1996, Boston, Massachusette, U.S.A..  pp.389-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 440
11.

国際会議録
国際会議録
11. In Situ TEM Analysis of TiSi2 C49-C54 Transformations During Annealing
Gignac, L. M. ; Svilan, V. ; Clevenger, L. A. ; Cabral, C., Jr. ; Lavoie, C.
出版情報: Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.255-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 441
12.

国際会議録
国際会議録
12. A Self-Aligned Silicide Process Utilizing Ion Implants For Reduced Silicon Consumption And Control Of The Silicide Formation Temperature
Cohen, G.M. ; Cabral, C., Jr. ; Lavoie, C. ; Solomon, P.M. ; Guarini, K.W. ; Chan, K.K. ; Roy, R.A.
出版情報: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.35-40,  2002.  Warrendale.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 716
13.

国際会議録
国際会議録
13. Influence of Substrate Temperature During Sputter Deposition on the Subsequent Formation of Titanium Disilicide
Ozcan, A.S. ; Ludwig Jr., K.F. ; Cabral Jr., C. ; Lavoie, C. ; Harper, J.M.E.
出版情報: Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.241-246,  2003.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 745
14.

国際会議録
国際会議録
14. Texture in Thin Films
Detavernier, C. ; Lavoie, C.
出版情報: Textures of materials : ICOTOM 14 : Proceedings of the 14th International Conference on Textures of Materials, held in Leuven, Belgium, July 11-15, 2005.  pp.1333-1342,  2005.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 495-497(2)
15.

国際会議録
国際会議録
15. In-situ Studies of Silicide Formation in Ti-Ta Bilayer Thin Films on Poly-Si
Ozcan, A.S. ; Ludwig K.F., Jr. ; Lavoie, C. ; Cabral, C., Jr. ; Harper, J.M.E.
出版情報: Magnetic and electronic films : microstructure, texture and application to data storage : symposium held April 1-4, 2002, San Francisco, California, U.S.A..  pp.43-50,  2002.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 721
16.

国際会議録
国際会議録
16. A Self-Aligned Silicide Process for Thin Silicon-on-Insulator MOSFETs and Bulk MOSFETs With Shallow Junctions
Cohen, G.M. ; Cabral, C., Jr. ; Lavoie, C. ; Solomon, P.M. ; Guarini, K.W. ; Chan, K.K. ; Roy, R.A.
出版情報: Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A..  pp.89-94,  2002.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 686
17.

国際会議録
国際会議録
17. Microstructure Evolution During Solid-State Reactions in Polycrystalline Nb/AI and Ti/AI Multilayer Thin Films
Barmak, K. ; Cabral, C. ; Carpenter, D. T. ; Lavoie, C. ; Lucadamo, G. ; Michaelsen, C. ; Rickman, J. M.
出版情報: Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.159-164,  1999.  Warrendale, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 562
18.

国際会議録
国際会議録
18. The Growth Of Tantalum Thin Films By Plasma-Enhanced Atomic Layer Deposition And Diffusion Barrier Properties
Kim, H. ; Cabral, C., Jr. ; Lavoie, C. ; Rossnagel, S.M.
出版情報: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.407-412,  2002.  Warrendale.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 716
19.

国際会議録
国際会議録
19. Microstructural Analysis Of Copper Interconnections Using Picosecond Ultrasonics
Harper, J.M. ; Malhotra, S.G. ; Cabral, Jr., C. ; Lavoie, C. ; Hao, H. ; Homsi, W. ; Maris, H.J.
出版情報: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D7.5-,  2001.  Warrendale, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 612
20.

国際会議録
国際会議録
20. Kinetics of Agglomeration of NiSi and NiSi2 Phase Formation
Detavernier, C. ; Ozcan, A. ; Lavoie, C. ; Sweet, Jean-Jordan ; Harper, J.M.E.
出版情報: Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.135-142,  2003.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 745
21.

国際会議録
国際会議録
21. Dependence of Crystallographic Texture of C54 TiSi2 on Thickness and Linewidth in Submicron CMOS Structures
Svilan, V. ; Rodbell, K. P. ; Clevenger, L. A. ; Cabral, C., Jr. ; Roy, R. A. ; Lavoie, C. ; Jordan-Sweet, J. ; Harper, J. M. E.
出版情報: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.53-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 427
22.

国際会議録
国際会議録
22. Phase Transformation and Microstructural Properties in Sputtered Versus CVD WSix Films
Domenicucci, A. ; Dehm, C. ; Loh, S. ; Clevenger, L. A. ; Dziobkowski, C. ; Cabral, C. ; Lavoie, C. ; Jorden-Sweet, J.
出版情報: Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.3-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 441
23.

国際会議録
国際会議録
23. Tapered hollow optical fibers with a xenon core for WDM applications
Arfaoui, I. ; Duguay, M.A. ; Lavoie, C. ; Trutschel, U.E. ; Langbein, U.
出版情報: Applications of photonic technology 5 : closing the gap between theory, development, and application : Photonics North 2002.  pp.1021-1029,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4833