Coia, C. ; Lavoie, C. ; d'Heurle, F. M. ; Desjardins, P. ; Detavernier, C. ; Kellock, A. J. (Invited Paper)
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.585-596, 2005. Pennington, NJ. Electrochemical Society
Textures of materials : ICOTOM 14 : Proceedings of the 14th International Conference on Textures of Materials, held in Leuven, Belgium, July 11-15, 2005. pp.1333-1342, 2005. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Detavernier, C. ; Ozcan, A. ; Lavoie, C. ; Sweet, Jean-Jordan ; Harper, J.M.E.
出版情報:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.. pp.135-142, 2003. Warrendale, Pa.. Materials Research Society