1.

国際会議録
国際会議録
1. Application of SPM interferometry in MEMS vibration measurement
C. Tang ; G. He ; C. Xu ; L. Zhao ; J. Hu
出版情報: Optical test and measurement technology and equipment.  3  pp.67235P-1-67235P-5,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6723
2.

国際会議録
国際会議録
2. Study on the methods for ensuring the precision of an x-ray microscope
L. Zhao ; D. Sun ; P. Liu ; J. Hu
出版情報: 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies.  2  pp.72822N-1-72822N-4,  2009.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 7282