Hymes, S. ; Kumar, K. S. ; Murarka, S. P. ; Wang, W. ; Lanford, W. A.
出版情報:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.193-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Hymes, S. ; Kumar, K. S. ; Murarka, S. P. ; Wang, W. ; Lanford, W. A.
出版情報:
Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.17-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
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