Herner, S. B. ; Krishnamoorthy, V. ; Jones, K. S. ; Mogi, T. K. ; Gossmann, H-J.
出版情報:
Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.157-, 1997. Pittsburgh, Penn. MRS - Materials Research Society
Herner, S. B. ; Krishnamoorthy, V. ; Robinson, H. G. ; Jones, K. S.
出版情報:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.469-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
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