1.

国際会議録
国際会議録
1. Enhanced hydrogenation in polycrystalline Si thin films using ultrasound treatment
Ostapenko,S. ; Koshka,Y. ; Jastrzebski,L. ; Smeltzer,R.K.
出版情報: Active matrix liquid crystal displays technology and applications : 10-11 February, 1997, San Jose, California.  pp.176-183,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3014
2.

国際会議録
国際会議録
2. Room-temperature luminescence diagnostics in polycrystalline silicon
Koshka,Y. ; Ostapenko,S. ; jastrzebski,L. ; Cao,J. ; Kaleis,J.P.
出版情報: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing.  pp.41-48,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3215