Presting, H. ; Konle, J. ; Palfinger, G. ; Kibbel, H. ; Konig, U. ; Uebele, P. ; Strobl, G. (Daimler Chrysler)
出版情報:
SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.651-664, 2004. Pennington, N.J.. Electrochemical Society
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.345-, 1995. Pittsburgh, PA. MRS - Materials Research Society