Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.103-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.267-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Santos-Filho, P. ; Koh, K. ; Stevens, G. ; Lucovsky, G.
出版情報:
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.57-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Santos-Filho, P. ; Stevens, G. ; Lu, Z. ; Koh, K. ; Lucovsky, G.
出版情報:
Thermodynamics and kinetics of phase transformations : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.345-, 1996. Pittsburgh, Penn.. MRS - Materials Research Society
Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.233-, 1996. Pittsburgh, PA. MRS - Materials Research Society
Lucovsky, G. ; Niimi, H. ; Koh, K. ; Lee, D.R. ; Jing, Z.
出版情報:
The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface. pp.441-455, 1996. Pennington, NJ. Electrochemical Society