Process Definition for Obtaining Ultrathin Silicon Oxides Using Full-Wafer Electrical and Optical Measurements
- 著者名:
Oberhofer, A. Chen, J. Koh, K. Schrader, M. Shah, S. Venables, R. Young, C. Xu, M. Kuehn, R. Maher, D. Venables, D. - 掲載資料名:
- Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 567
- 発行年:
- 1999
- 開始ページ:
- 573
- 出版情報:
- Warrendale, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994744 [1558994742]
- 言語:
- 英語
- 請求記号:
- M23500/567
- 資料種別:
- 国際会議録
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