1.

国際会議録
国際会議録
1. Investigation of stress in aluminum thin film for MEMS applications
Shin, J.-W. ; Chung, S.-W. ; Shim, D.-S. ; Shin, H. ; Koh, B.
出版情報: Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia.  pp.263-273,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4593
2.

国際会議録
国際会議録
2. Novel design and fabrication of Si optical bench
Choi, H. ; Kim, J.H. ; Kim, S.-C. ; Kim, S. ; Kim, Y.S. ; Koh, B.
出版情報: Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia.  pp.137-144,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4593