Formation and Annihilation of Epitaxial Stacking Faults Generated from Pre-Existing Nucleation Sites in Silicon
- 著者名:
Cho,C.R. Noh,K.Y. Lee,D.H. Kim,Y.S. Ko,S.W. Kim,C.W. Kim,D.H. Son,C.B. Kim,S.J. Cho,D.H. Choi,J.J. Kim,D.J. Bae,K.M. Rozgonyi,G.A. - 掲載資料名:
- High Purity Silicon VI : proceedings of the sixth International Symposium
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4218
- 発行年:
- 2000
- 開始ページ:
- 201
- 終了ページ:
- 208
- 総ページ数:
- 8
- 出版情報:
- Pennington, N.J. — Bellingham, Wash.: Electrochemical Society — SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9781566772846 [1566772842]
- 言語:
- 英語
- 請求記号:
- P63600/4218
- 資料種別:
- 国際会議録
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