Eco-materials processing & design VII : proceedings of the Conference of the 7th International Symposium on Eco-materials Processing & Design, January 8-11 2006, Chengdu, China. pp.946-949, 2006. Uetikon-Zuerich. Trans Tech Publications
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.88-93, 2003. Pennington, N.J.. Electrochemical Society
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1626-1634, 1997. Pennington, NJ. Electrochemical Society
Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium. pp.84-91, 2002. Pennington, N.J.. Electrochemical Society
Kim, J.J. ; Youn, S.H. ; Hwang, K.H. ; Yoon, J.B. ; Lee, S.G. ; Jun, B.S. ; Lee, J.K. ; Yoon, S.Y. ; Kim, H.
出版情報:
Eco-materials processing & design VII : proceedings of the Conference of the 7th International Symposium on Eco-materials Processing & Design, January 8-11 2006, Chengdu, China. pp.598-601, 2006. Uetikon-Zuerich. Trans Tech Publications
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology. pp.268-275, 2001. Pennington, N.J.. Electrochemical Society
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology. pp.276-283, 2001. Pennington, N.J.. Electrochemical Society
Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003. pp.481-484, 2004. Zuerich. Trans Tech Publications
Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2002. Warrendale, PA. Materials Research Society