Nieh, R. ; Onishi, K. ; Choi, R. ; Dharmarajan, E. ; Gopalan, S. ; Kang, C.S. ; Lee, J.C.
出版情報:
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium. pp.171-182, 2001. Pennington, NJ. Electrochemical Society
Nieh, R. ; Qi, W-J. ; Lee, B.H. ; Kang, L. ; Jeon, Y. ; Onishi, K. ; Gopalan, S. ; Kang, C.S. ; Dhrarmarajan, E. ; Choi, R. ; Lee, J.C.
出版情報:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium. pp.214-221, 2000. Pennington, N.J.. Electrochemical Society