1.

国際会議録
国際会議録
1. Toward performance-driven reduction of the cost of RET-based lithography control (Invited Paper)
Gupta, P. ; Kahng, A.B. ; Sylvester, D. ; Yang, J.
出版情報: Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA.  pp.123-133,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 5043
2.

国際会議録
国際会議録
2. Performance-impact limited-area fill synthesis
Chen, Y. ; Gupta, P. ; Kahng, A.B.
出版情報: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.75-86,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 5042