1.

国際会議録
国際会議録
1. Monte-Carlo methods for chemical-mechanical planarization on multiple-layer and dual- material models
Chen, Y. ; Kahng, A.B. ; Robins, G. ; Zelikovsky, A.
出版情報: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.421-432,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4692
2.

国際会議録
国際会議録
2. Performance-impact limited-area fill synthesis
Chen, Y. ; Gupta, P. ; Kahng, A.B.
出版情報: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.75-86,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 5042