Applications of image diagnostics to metrology quality assurance and process control
- 著者名:
Allgair, J.A. ( Motorola, Inc. (USA) ) Boksha, V.V. ( Boksha Global Partners LP (USA) ) Bunday, B.D. ( International SEMATECH (USA) ) Diebold, A.C. ( International SEMATECH (USA) ) Cole, D.C. ( Boston Univ. (USA) ) Davidson, M.P. ( Spectel Research Corp. (USA) ) Hutcheson, J.D. ( VLSI Research, Inc. (USA) ) Gurnell, A.W. ( M2C Services (United Kingdom) ) Joy, D.C. ( Univ. of Tennessee/Knoxville (USA) ) McIntosh, J.M. Muckenhirn, S.G. Pellegrini, J.C. ( New Vision Systems (USA) ) Larrabee, R.D. ( National Institute of Standards and Technology (USA) ) Potzick, J.E. Vlada, A.E. Smith, N.P. ( Accent Optical Technologies (United Kingdom) ) Starikov, A. ( Intel Corp. (USA) ) Sulivan, N.T. ( Schlumberger Technologies, Inc. (USA) ) Wells, O.C. ( IBM Corp. (USA) ) - 掲載資料名:
- Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5042
- 発行年:
- 2003
- 開始ページ:
- 251
- 終了ページ:
- 277
- 総ページ数:
- 27
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448477 [0819448478]
- 言語:
- 英語
- 請求記号:
- P63600/5042
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |