1.
国際会議録
Vogt, B.D. ; Soles, C.L. ; Prabhu, V.M. ; Jones, R.L. ; Wu, W.-L. ; Lin, E.K. ; Goldfarb, D.L. ; Angelopoulos, M.
出版情報:
Advances in Resist Technology and Processing XXI . pp.56-62, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5376
2.
国際会議録
Jones, R.L. ; Hu, T. ; Lin, E.K. ; Wu, W. ; Casa, D.M. ; Orji, N.G. ; Vorburger, T.V. ; Bolton, P.J. ; Barclay, G.G.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XVII . 1 pp.191-199, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5038
3.
国際会議録
Lin, E.K. ; Jones, R.L. ; Wu, W.-L. ; Barker, J.G. ; Bolton, P.J. ; Barclay, G.G.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XVI . Part One pp.541-548, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4689
4.
国際会議録
Jones, R.L. ; Soles, C.L. ; Starr, F.W. ; Lin, E.K. ; Lenhart, J.L. ; Wu, W.-L. ; Goldfarb, D.L. ; Angelopoulos, M.
出版情報:
Advances in Resist Technology and Processing XIX . Part One pp.342-350, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4690
5.
国際会議録
Lin, E.K. ; Soles, C.L. ; Goldfarb, D.L. ; Trinque, B.C. ; Burns, S.D. ; Jones, R.L. ; Lenhart, J.L. ; Angelopoulos, M. ; Willson, C.G. ; Satija, S.K. ; Wu, W.-L.
出版情報:
Advances in Resist Technology and Processing XIX . Part One pp.313-320, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4690
6.
国際会議録
Jones, R.L. ; Hu, T. ; Soles, C.L. ; Lin, E.K. ; Wu, W.- ; Casa, D.M. ; Mahorowala, A.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XVIII . pp.191-198, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5375
7.
国際会議録
Jones, R.L. ; Hu, T. ; Prabhu, V.M. ; Soles, C.L. ; Lin, E.K. ; Wu, W. ; Goldfarb, D.L. ; Angelopoulos, M. ; Trinque, B.C.] ; Willson, C.G.
出版情報:
Advances in Resist Technology and Processing XX . 2 pp.1031-1040, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5039
8.
国際会議録
Lenhart, J.L. ; Fischer, D.A. ; Sambasivan, S. ; Lin, E.K. ; Jones, R.L. ; Soles, C.L. ; Wu, W. ; Goldfarb, D.L. ; Angelopoulos, M.
出版情報:
Advances in Resist Technology and Processing XX . 1 pp.343-356, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5039
9.
国際会議録
Soles, C.L. ; Jones, R.L. ; Lenhart, J.L. ; Prabhu, V.M. ; Wu, W. ; Lin, E.K. ; Goldfarb, D.L. ; Angelopoulos, M.
出版情報:
Advances in Resist Technology and Processing XX . 1 pp.366-375, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5039
10.
国際会議録
Prabhu, V.M. ; Jones, R.L. ; Lin, E.K. ; Soles, C.L. ; Wu, W. ; Goldfarb, D.L. ; Angelopoulos, M.
出版情報:
Advances in Resist Technology and Processing XX . 1 pp.404-414, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5039