Zaslavsky, A. ; Mariolle, D. ; Deleonibus, S. ; Fraboulet, D. ; Luryi, S. ; Liu, J. ; Aydin, C. ; Mastrapasqua, M. ; King, C.A. ; Johnson, R.W.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.956-967, 2002. Pennington, NJ. Electrochemical Society
Zaslavsky, A. ; Mariolle, D. ; Deleonibus, S. ; Fraboulet, D. ; Luryi, S. ; Liu, J. ; Aydin, C. ; Mastrapasqua, M. ; King, C.A. ; Johnson, R.W.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.956-967, 2002. Pennington, NJ. Electrochemical Society
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium. pp.381-392, 2001. Pennington, NJ. Electrochemical Society