Yamamoto, Y. ; Hasuda, M. ; Suzuki, H. ; Sato, M. ; Takaoka, O. ; Matsumura, H. ; Matsumoto, N. ; Iwasaki, K. ; Hagiwara, R. ; Suzuki, K. ; Ikku, Y. ; Aita, K. ; Kaito, T. ; Adachi, T. ; Yasaka, A. ; Yamamoto, J. ; Iwasaki, T. ; Yamabe, M.
出版情報:
Photomask and Next-Generation Lithography Mask Technology XI. pp.348-356, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering