Ichikawa, Y. ; Maekawa, S. ; Takashima, K. ; Shimojo, M. ; Higo, Y. ; Swain, M. V.
出版情報:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.273-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Mizutani, Y. ; Higo, Y. ; Ichikawa, Y. ; Morita, A. ; Takashima, K. ; Swain, M.V.
出版情報:
Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.. 2001. Warrendale, Pa.. Materials Research Society