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Attainment of Low Resistivity Polycide Films Using Rapid Thermal Annealing

著者名:
Yoon, H.A.
Chen, C.
Singhal, A.
Lapes, D.
Miner, G.
Hong, S.
Yamazaki, M.
Maeda, Y.
さらに 3 件
掲載資料名:
Advances in rapid thermal processing : proceedings of the symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
99-10
発行年:
1999
開始ページ:
249
終了ページ:
256
総ページ数:
8
出版情報:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772327 [156677232X]
言語:
英語
請求記号:
E23400/99-10
資料種別:
国際会議録

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