Yin, H. ; Peterson, R. L. ; Hobart, K. D. ; Shieh, S. R. ; Duffy, T. S. ; Sturm, J. C.
出版情報:
Intergration of heterogeneous thin-film materials and devices : symposium held April 23-24, 2003, San Francisco, California, U.S.A.. pp.15-20, 2003. Warrendale, PA. Materials Research Society
Yin, H. ; Peterson, R. L. ; Hobart, K. D. ; Shieh, S. R. ; Duffy, T. S. ; Sturm, J. C.
出版情報:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.147-152, 2003. Warrendale, Pa.. Materials Research Society