1.

国際会議録
国際会議録
1. Study by in Situ FTIR Spectroscopy of the Roles of Homogeneous and Heterogeneous Reactions in the Decomposition of Precursors
Condorelli, G.G. ; Hitchman, M.L. ; Kovalgin, A.Y. ; Shamlian, S.H.
出版情報: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.901-908,  1997.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 97-25
2.

国際会議録
国際会議録
2. In Situ Studies of TEOS/OZONE CVD: Experimental Considerations for Probing Reactions in Commercial CVD Equipment
Condorelli, G.G. ; Hitchman, M.L. ; Kovalgin, A.Y. ; Shamlian, S.H.
出版情報: Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis.  pp.153-161,  1998.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 98-23