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出版情報:
Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.22-33, 1999. Pennington, N.J.. Electrochemical Society
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1224-1231, 1998. Pennington, NJ. Electrochemical Society
Agarwal, A. ; Eaglesham, D.J. ; Gossmann, H.-J. ; Pelaz, L. ; Herner, S.B. ; Jacobson, D.C. ; Haynes, T.E. ; Erokhin, Yu E.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1232-1240, 1998. Pennington, NJ. Electrochemical Society
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.169-174, 2005. Warrendale, Pa.. Materials Research Society
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.1029-1040, 1994. Pennington, NJ. Electrochemical Society
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