1.

国際会議録
国際会議録
1. EVIDENCE FOR OXYGEN CONCENTRATION CHANGES INDUCED BY LOW-TEMPERATURE 0-18 IMPLANTATION INTO A SIMOX BURIED-OXIDE LAYER
Scalon, P. J. ; Hemment, P. L. F. ; Robinson, A. K. ; Reeson, K. J. ; Chater, R. J. ; Kilner, J. A. ; Harbeke, G.
出版情報: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.141-146,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 107
2.

国際会議録
国際会議録
2. DETERMINATION OF THE NITROGEN CONTENT OF AS-IMPLANTED AND ANNEALED SIMOX SUBSTRATES
Kilner, J. A. ; Chater, R. J. ; Biswas, S. ; Hemment, P. L. F. ; Reeson, K. J.
出版情報: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.151-156,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 107
3.

国際会議録
国際会議録
3. MONITORING SIMOX LAYER PROPERTIES AND IMPLANTATION TEMPERATURE BY OPTICAL MEASUREMENTS
Harbeke, G. ; Steigneier, E. F. ; Hemment, P. L. F. ; Reeson, K. J. ; Jastrzebski, L.
出版情報: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.133-136,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 107
4.

国際会議録
国際会議録
4. TOTAL DIELECTRIC ISOLATION (TDI) OF DEVICE ISLANDS USING SIMOX/SOI TECHNOLOGY
Hemment, P. L. F. ; Robinson, A. K. ; Reeson, K. J. ; Davis, J. R. ; Kilner, J. R. ; Chater, R. J. ; Stoemenos, J.
出版情報: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.87-92,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 107
5.

国際会議録
国際会議録
5. TEM OBSERVATIONS OF SILICON-ON-INSULATOR STRUCTURES FORMED BY NITROGEN IMPLANTATION WITH ANNEALING AT 1405°C
Meekison, C. D. ; Booker, G. R. ; Reeson, K. J. ; Hemment, P. L. F. ; Celler, G. K.
出版情報: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.467-472,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 107
6.

国際会議録
国際会議録
6. SYNTHESIS OF BURIED LAYERS OF β SiC IN SINGLE CRYSTAL SILICON
Reeson, K. J. ; Hemment, P. L. F. ; Stoemenos, J. ; Davis, J. R. ; Celler, G. K.
出版情報: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.473-478,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 107