1.

国際会議録
国際会議録
1. TEM OBSERVATIONS OF SILICON-ON-INSULATOR STRUCTURES FORMED BY NITROGEN IMPLANTATION WITH ANNEALING AT 1405°C
Meekison, C. D. ; Booker, G. R. ; Reeson, K. J. ; Hemment, P. L. F. ; Celler, G. K.
出版情報: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.467-472,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 107
2.

国際会議録
国際会議録
2. SYNTHESIS OF BURIED LAYERS OF β SiC IN SINGLE CRYSTAL SILICON
Reeson, K. J. ; Hemment, P. L. F. ; Stoemenos, J. ; Davis, J. R. ; Celler, G. K.
出版情報: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.473-478,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 107