Hattangady, S. ; Misra, V. ; Yasuda, T. ; Xu, X.L. ; Hornung, B. ; Lucovsky, G. ; Wortman, J.J.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.288-295, 1994. Pennington, NJ. Electrochemical Society
Hattangady, S. ; Xu, X-L ; Watkins, M. J. ; Hornung, B. ; Misra, V. ; Lucovsky, G. ; Wortman, J. J.
出版情報:
III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.581-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society