Clevenger, L. A. ; Arcot, B. ; Ziegler, W. ; Colgan, E. G. ; Hong, Q. Z. ; d'Heurle, F. M. ; Cabral, C., Jr. ; Gallo, T. A. ; Harper, J. M. E.
出版情報:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.133-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Harper, J. M. E. ; Rodbell, K. P. ; Colgan, E. G. ; Hammond, R. H.
出版情報:
Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A.. pp.27-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Colgan, E. G. ; Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E.
出版情報:
Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.321-, 1995. Pittsburgh. MRS - Materials Research Society
Harper, J. M. E. ; Clevenger, L. A. ; Colgan, E. G. ; Cabral, C., Jr. ; Arcot, B.
出版情報:
Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.307-, 1994. Pittsburgh. MRS - Materials Research Society
Colgan, E. G. ; Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E.
出版情報:
Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.49-, 1995. Pittsburgh, PA. MRS - Materials Research Society
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