1.

国際会議録
国際会議録
1. EFFECTS OF PRE-GATE OXIDATION INTRINSIC GETTERING UPON THIN GATE OXIDE INTEGRITY IN HIGH CARBON CONTENT Cz Si
Hahn, S. ; Tung, C. Y. ; Lee, J. ; Tuomi, T. ; Partanen, J.
出版情報: Multilayers : synthesis, properties, and non-electronic applications : symposium held December 2-4, 1987, Boston, Massachusetts, U.S.A..  pp.103-108,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 103
2.

国際会議録
国際会議録
2. EFFECTS OF PRE-GATE OXIDATION INTRINSIC GETTERING UPON THIN GATE OXIDE INTEGRITY IN HIGH CARBON CONTENT Cz Si
Hahn, S. ; Tung, C. Y. ; Lee, J. ; Tuomi, T. ; Partnanen, J.
出版情報: SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A..  pp.103-108,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 105
3.

国際会議録
国際会議録
3. OXYGEN PRECIPITATION STUDIES FOR N-TYPE AND EPITAXIAL SILICON SUB-STRATES DURING SIMULATED CMOS CYCLES BY SYNCHROTRON SECTION TOPOGRAPHY
Tuomi, T. ; Hahn, S. ; Tilli, M. ; Wong, C.-C.D. ; Borland, O.
出版情報: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.47-52,  1986.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 71