Harendt, C. ; Schuhbauer, A. ; Apel, U. ; Dudek, V. ; Graf, H.-G. ; Hoefflinger, B. ; Penteker, E.
出版情報:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.501-508, 1997. Pennington, NJ. Electrochemical Society
Harendt, C. ; Beintner, J. ; Schunbauer, A. ; Apel, U. ; Dudek, V. ; Graf, H.-G. ; Hoefflinger, B. ; Seger, U.
出版情報:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.568-575, 1997. Pennington, NJ. Electrochemical Society