Kissinger, G. ; Vanhellemont, J. ; Lambert, U. ; Dornberger, E. ; Sorge, R. ; Morgenstern, G. ; Grabolla, T. ; Graef, D. ; von Ammon, W. ; Wagner, P. ; Richter, H.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1095-1112, 1998. Pennington, NJ. Electrochemical Society
Ammon, W.v. ; Ehlert, A. ; Lambert, U. ; Graef, D. ; Brohl, M. ; Wagner, P.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.136-147, 1994. Pennington, NJ. Electrochemical Society
Graef, D. ; Wahlich, R. ; Krottenthaler, P. ; Feijoo, D. ; Lambert, U ; Wagner, P.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.18-31, 1997. Pennington, NJ. Electrochemical Society
Kissinger, G. ; Morgenstern, G. ; Richter, H. ; Vanhellemont, J. ; Graef, D. ; Lambert, U. ; von Ammon, W. ; Wagner, P.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.32-39, 1997. Pennington, NJ. Electrochemical Society